A highly sensitive quartz-crystal microbalance for sputtering investigations in slow ion-surface collisions

G. Hayderer, M. Schmid, P. Varga, H.P. Winter, and F. Aumayr

Institut für Allgemeine Physik, Technische Universität Wien, A-1040 Wien, Austria

Rev. Sci. Instrum. 70 (1999) 3696-3700

A quartz-crystal microbalance technique for measuring total sputter yields in ion-surface collisions is described. The electronic circuit to drive the quartz crystal ensures low noise and high frequency stability. By measuring the total sputter yields for impact of singly charged ions on LiF target films a sensitivity limit of 0.5% of a monolayer per minute could be achieved.

Corresponding author: F. Aumayr (aumayr< encoded email address >).

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