The reactor basically consists of a 1.2 m long fused silica tube with an inner diameter of 25 mm and external ring electrodes allowing an electrodeless rf discharge up to a power of 1.1 kW at a frequency of 13.56 MHz. The discharge can be operated also in a pulsed mode. The reactor is positioned within a furnace allowing a heating of the process gas up to temperatures of 1100 °C.

The reactor can be operated with well-defined process gas mixtures at pressures down to approximately 0.1 mbar. Samples inserted into the reactor can be treated with or without plasma activation. Furthermore, plasma chemical investigations can be performed using a special designed gas extraction probe in combination with a mass spectrometer.