The ultra high vacuum quadrupole mass spectrometers are used for a variety of analytical tasks, including process monitoring and outgasing. A variety of pressure reduction and rapid sampling gas inlets are available. The mass range is up to 511 atomic mass units (amu). A rapid sampling device developed in our group permits the monitoring of processes with a time resolution below 5 ms. This system can be combined with our tubular furnace for a variety plasma chemical studies.

References:

[1] J. Laimer, G. Misslinger, H. Störi, Limitations in the time resolution of quadrupole mass spectrometry using a flushed extraction probe, Int. J. of Mass Spectrometry, 223-224 (2003), 301 - 312.

[2] J. Laimer, G. Misslinger, and H. Störi, Mass spectrometry with a temporal resolution of a few milliseconds using a helium flushed probe system, Vacuum 61 (2001) 435 - 439